IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design of a Precise Axial Adjusting Mechanism with Three Guiding Flexures for Optical Element

2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

Author(s): Kang Guo ; Defu Zhang ; Huanan Chen ; Mingyang Ni ; Yongxin Sui
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2018
Conference Location: Hangzhou, China, China
Conference Date: 13 August 2018
Page(s): 96 - 100
ISBN (Electronic): 978-1-5386-6214-4
ISBN (USB): 978-1-5386-6213-7
DOI: 10.1109/3M-NANO.2018.8552203
Regular:

The guiding flexure is generally used in the positioning mechanism for in-plane movement and nanometer level adjustment accuracy. In this paper, an axial adjusting mechanism for regulating optical... View More

Advertisement