IEEE - Institute of Electrical and Electronics Engineers, Inc. - Rotation Error Suppression for a Doubly Decoupled MEMS Gyroscope

2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

Author(s): Hengzhi Hu ; Xudong Zheng ; Yiyu Lin
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2018
Conference Location: Hangzhou, China, China
Conference Date: 13 August 2018
Page(s): 91 - 95
ISBN (Electronic): 978-1-5386-6214-4
ISBN (USB): 978-1-5386-6213-7
DOI: 10.1109/3M-NANO.2018.8552175
Regular:

doubly decoupled spring structure has been widely used in MEMS gyroscopes to suppress the cross- coupling between gyroscope driving mode and sensing mode. However, rotation and translation error... View More

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