IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design Parameters for the Housing of Two-Dimensional Air Flow Sensors

Author(s): Reiner Jedermann ; Nico Hartgenbusch ; Mykhailo Borysov ; Walter Lang
Sponsor(s): IEEE Sensors Council
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 15 December 2018
Volume: 18
Page(s): 10,154 - 10,162
ISSN (CD): 2379-9153
ISSN (Electronic): 1558-1748
ISSN (Paper): 1530-437X
DOI: 10.1109/JSEN.2018.2873896
Regular:

Micro machined sensors for the 2-D measurement of air flow magnitude and direction achieve very high sensitivity. The housing required for the protection of the sensor membrane greatly reduces the... View More

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