IEEE - Institute of Electrical and Electronics Engineers, Inc. - Comparative Study on Modeling Approaches of V-Shaped MEMS Temperature Sensors

Author(s): Yaniv Cohen ; Assaf Ya'akobovitz
Sponsor(s): IEEE Instrumentation and Measurement Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1 - 10
ISSN (Electronic): 1557-9662
ISSN (Paper): 0018-9456
DOI: 10.1109/TIM.2018.2879144
Regular:

Thermal microelectromechanical system (MEMS) devices have gained immensely in popularity due to their good performances, relatively simple fabrication process, and to the availability of... View More

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