IEEE - Institute of Electrical and Electronics Engineers, Inc. - Magnetron Sputtered Hydrogenated Silicon Thin Films: Assessment for Application in Photovoltaics

2017 IEEE 44th Photovoltaic Specialists Conference (PVSC)

Author(s): Dipendra Adhikari ; Maxwell M. Junda ; Sylvain X. Marsillac ; Robert W. Collins ; Nikolas J. Podraza
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2017
Conference Location: Washington, DC, USA
Conference Date: 25 June 2017
Page(s): 2,582 - 2,587
ISBN (Electronic): 978-1-5090-5605-7
DOI: 10.1109/PVSC.2017.8366155
Regular:

Hydrogenated amorphous and nanocrystalline silicon (a-Si:H, nc-Si:H) thin films have been prepared by radio frequency magnetron sputtering with process parameters used to manipulate optical... View More

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