IEEE - Institute of Electrical and Electronics Engineers, Inc. - Defect Data Classification and Analysis in VLSI Fabrication

2018 Second International Conference on Electronics, Communication and Aerospace Technology (ICECA)

Author(s): Priyanka Sharma ; Munish Rehal ; Parveen K. Bangotra
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 2018
Conference Location: Coimbatore, India
Conference Date: 29 March 2018
Page(s): 1,447 - 1,453
ISBN (Electronic): 978-1-5386-0965-1
DOI: 10.1109/ICECA.2018.8474650
Regular:

VLSI fabrication (VLSI Fab) process is perhaps one of the world's most complex manufacturing process carried out under highly stringent parameters of man, machine & environment. Generally, a... View More

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