IEEE - Institute of Electrical and Electronics Engineers, Inc. - Nanoelectromechanical Disk Resonators as Highly Sensitive Mass Sensors

Author(s): Vahid Qaradaghi ; A. Ramezany ; S. Babu ; J. B. Lee ; S. Pourkamali
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2018
Volume: 39
Page(s): 1,744 - 1,747
ISSN (Electronic): 1558-0563
ISSN (Paper): 0741-3106
DOI: 10.1109/LED.2018.2871754
Regular:

This letter presents electro-thermally actuated nanomechanical disk resonators and characterization of their performance as highly sensitive mass sensors both in air and liquid. Operating in-plane... View More

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