IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Self-Adaptive Stiffness Approach to Improving the Robustness of Electrostatic Switches Against Parameter Variations

Author(s): Xiaojian Xiang ; Xuhan Dai ; Kai Wang ; Shi Sun ; Guifu Ding ; Xiaolin Zhao
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2018
Volume: 39
Page(s): 1,748 - 1,751
ISSN (Electronic): 1558-0563
ISSN (Paper): 0741-3106
DOI: 10.1109/LED.2018.2871374
Regular:

The "soft-landing" effect during the closure of RF-MEMS switches is crucial for improving their reliability. However, the rebound suppression effectiveness has rather poor robustness against the... View More

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