IEEE - Institute of Electrical and Electronics Engineers, Inc. - Characterization of Elastic Modulus Across the (Al1– x Sc x )N System Using DFT and Substrate-Effect-Corrected Nanoindentation

Author(s): Dong Wu ; Yachao Chen ; Sukriti Manna ; Kevin Talley ; Andriy Zakutayev ; Geoff L. Brennecka ; Cristian V. Ciobanu ; Paul Constantine ; Corinne E. Packard
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2018
Volume: 65
Page(s): 2,167 - 2,175
ISSN (Electronic): 1525-8955
ISSN (Paper): 0885-3010
DOI: 10.1109/TUFFC.2018.2862240
Regular:

Knowledge of accurate values of elastic modulus of (Al1-xScx)N is required for design of piezoelectric resonators and related devices. Thin films of... View More

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