IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Miniature Fiber-Optic Microphone Based on an Annular Corrugated MEMS Diaphragm

Author(s): Xueqi Lu ; Yu Wu ; Yuan Gong ; Yunjiang Rao
Sponsor(s): IEEE Lasers and Electro-Optics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 15 November 2018
Volume: 36
Page(s): 5,224 - 5,229
ISSN (Electronic): 1558-2213
ISSN (Paper): 0733-8724
DOI: 10.1109/JLT.2018.2868964
Regular:

A miniature fiber-optic microphone (FOM) based on a periodic corrugated microelectro-mechanical-system (MEMS) diaphragm has been developed in this paper. A micro Fabry-Perot cavity is an... View More

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