IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and Implementation of a Bistable Force/Acceleration Sensing Device Considering Fabrication Tolerances

Author(s): Erez Benjamin ; Stella Lulinsky ; Slava Krylov
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2018
Volume: 27
Page(s): 854 - 865
ISSN (Electronic): 1941-0158
ISSN (Paper): 1057-7157
DOI: 10.1109/JMEMS.2018.2852621
Regular:

We report on a design methodology, fabrication, and characterization of a bistable actuator operated by a parallel-plate electrostatic transducer. The operational principle of the device, which... View More

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