IEEE - Institute of Electrical and Electronics Engineers, Inc. - Inverse Eigenvalue Sensing in Coupled Micro/Nano System

Author(s): Guowei Tao ; Hemin Zhang ; Honglong Chang ; Bhaskar Choubey
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2018
Volume: 27
Page(s): 886 - 895
ISSN (Electronic): 1941-0158
ISSN (Paper): 1057-7157
DOI: 10.1109/JMEMS.2018.2855080
Regular:

Micro/nano resonators are extensively used for sensing. Coupled arrays of such sensors can enhance functionality, sensitivity, and accuracy. Sensing can be performed using either the eigenvalue or... View More

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