IEEE - Institute of Electrical and Electronics Engineers, Inc. - Interaction-Effect Search Algorithm for the KSA Scheme

Author(s): Chin-Yi Lin ; Yu-Ming Hsieh ; Fan-Tien Cheng ; Yu-Ru Yang ; Muhammad Adnan
Sponsor(s): RAS
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2018
Volume: 3
Page(s): 2,778 - 2,785
ISSN (CD): 2377-3774
ISSN (Electronic): 2377-3766
DOI: 10.1109/LRA.2018.2838323
Regular:

With the trend of even smaller workpieces and complicated processes in the semiconductor industry, yield enhancement becomes the crucial indicator of enterprise profits. However, the advancement... View More

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