IEEE - Institute of Electrical and Electronics Engineers, Inc. - Sidewall Imaging of Microstructures with a Tilted Quartz Tuning Fork (QTF) Force Sensor

2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)

Author(s): Danish Hussain ; Wen Yongbing ; Hui Xie
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2018
Conference Location: Nagoya, Japan, Japan
Conference Date: 4 July 2018
Page(s): 1 - 5
ISBN (Electronic): 978-1-5386-4841-4
ISBN (USB): 978-1-5386-4840-7
DOI: 10.1109/MARSS.2018.8481199
Regular:

Sidewall imaging of micro and nano structures is essential for critical dimensional metrology in the semiconductor industry. Atomic force microscope is an important sidewall imaging instrument due... View More

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