IEEE - Institute of Electrical and Electronics Engineers, Inc. - Accurate 3D-Positioning in a SEM Through Robot Calibration

2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)

Author(s): Valerian Guelpa ; Andrey V. Kudryavtsev ; Nadine Le-Fort Piat ; Sounkalo Dembele
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2018
Conference Location: Nagoya, Japan, Japan
Conference Date: 4 July 2018
Page(s): 1 - 6
ISBN (Electronic): 978-1-5386-4841-4
ISBN (USB): 978-1-5386-4840-7
DOI: 10.1109/MARSS.2018.8481224
Regular:

With growing trend of miniaturization, new challenges in microrobotics have appeared. In particular, the complexity of microworld comes from the fact that visual sensors such as Scanning Electron... View More

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