IEEE - Institute of Electrical and Electronics Engineers, Inc. - pH Sensing Characteristics of Silicon Nitride as Sensing Membrane based ISFET Sensor for Artificial Kidney

2018 IEEE International Conference on Semiconductor Electronics (ICSE)

Author(s): Mas Syarafina Norzin ; Azrul Azlan Hamzah ; Farahdiana Wan Yunus ; Jumril Yunas ; Burhanuddin Yeop Majlis
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2018
Conference Location: Kuala Lumpur, Malaysia, Malaysia
Conference Date: 15 August 2018
Page(s): 124 - 127
ISBN (Electronic): 978-1-5386-5283-1
ISBN (USB): 978-1-5386-5282-4
DOI: 10.1109/SMELEC.2018.8481303
Regular:

Field Effect sensor are widely used for detecting various target of analytes in chemical and biological solutions. The electrochemical sensor like Ion Sensitive Filed Effect Transistor (ISFETs) is... View More

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