IEEE - Institute of Electrical and Electronics Engineers, Inc. - High Aspect Plasmonic Nanotrench Structures as Sensors in the Near- and Mid-IR Frequency Range
2018 20th International Conference on Transparent Optical Networks (ICTON)
Author(s): | Evgeniy Shkondin ; Taavi Repan ; Radu Malureanu ; Andrei V. Lavrinenko ; Osamu Takayama |
Publisher: | IEEE - Institute of Electrical and Electronics Engineers, Inc. |
Publication Date: | 1 July 2018 |
Conference Location: | Bucharest, Romania, Romania |
Conference Date: | 1 July 2018 |
Page(s): | 1 - 3 |
ISBN (Electronic): | 978-1-5386-6605-0 |
ISBN (USB): | 978-1-5386-6604-3 |
ISSN (Electronic): | 2161-2064 |
DOI: | 10.1109/ICTON.2018.8473579 |
Regular:
Titanium nitride (TiN) and aluminum-doped zinc oxide (AZO) high-aspect trench structures are fabricated using a combination of deep reactive ion etching and atomic layer deposition. These... View More