IEEE - Institute of Electrical and Electronics Engineers, Inc. - 2-D Vertical Filament Capacitive Sensor for the Measurement in Vacuum Environment

Author(s): Tao Zeng ; Yunfeng Lu ; Le Chen ; Yaqiong Fu ; Suan Xu
Sponsor(s): IEEE Instrumentation and Measurement Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2018
Volume: 67
Page(s): 2,382 - 2,389
ISSN (Electronic): 1557-9662
ISSN (Paper): 0018-9456
DOI: 10.1109/TIM.2018.2817398
Regular:

A 2-D vertical filament capacitive sensor is proposed in this paper to measure the moving departure from the vertical in vacuum environment. This sensor mainly consists of a vertical filament... View More

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