IEEE - Institute of Electrical and Electronics Engineers, Inc. - Effect of Surface Stress on Resonance Frequency of Microcantilever Sensors

Author(s): Priyanka Singh ; R. D. S. Yadava
Sponsor(s): IEEE Sensors Council
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 15 September 2018
Volume: 18
Page(s): 7,529 - 7,536
ISSN (CD): 2379-9153
ISSN (Electronic): 1558-1748
ISSN (Paper): 1530-437X
DOI: 10.1109/JSEN.2018.2861228
Regular:

This paper models the effect of surface stress on the cantilever flexural vibrations based on the balance equations for the transverse forces and bending moments, and seeks solutions within normal... View More

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