IEEE - Institute of Electrical and Electronics Engineers, Inc. - Ultimate limits of differential resonant MEMS sensors based on two coupled linear resonators

Author(s): J. Juillard ; P. Prache ; P. Maris Ferreira ; N. Barniol
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1525-8955
ISSN (Paper): 0885-3010
DOI: 10.1109/TUFFC.2018.2869415
Regular:

In this paper, we investigate how additive noise, e.g. thermomechanical noise, impacts the resolution of mode-localized resonant sensing architectures based on two passively-coupled linear... View More

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