IEEE - Institute of Electrical and Electronics Engineers, Inc. - Bow reduction of AlInGaN-based deep UV LED wafers using focused laser patterning

Author(s): Hyun Kyong Cho ; Alex Kulberg ; Neysha Lobo Ploch ; Jens Rass ; Jan Ruschel ; Tim Kolbe ; Ana Knauer ; Andrea Braun ; Olaf Kruger ; Sven Einfeldt ; Markus Weyers ; Michael Kneissl
Sponsor(s): IEEE Lasers and Electro-Optics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Electronic): 1941-0174
ISSN (Paper): 1041-1135
DOI: 10.1109/LPT.2018.2869218
Regular:

We investigated the effect of bow reduction of AlInGaN-based deep-ultraviolet light-emitting diode (DUV LED) wafers using internally focused laser patterning. The laser-induced stress inside of... View More

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