IEEE - Institute of Electrical and Electronics Engineers, Inc. - Mg x Zn1– x O/ZnO Quantum Well Photodetectors Fabricated by Radio-Frequency Magnetron Sputtering

Author(s): J. D. Hwang ; H. C. Chiu ; C. I. Jiang
Sponsor(s): IEEE Lasers and Electro-Optics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2018
Volume: 30
Page(s): 1,583 - 1,586
ISSN (Electronic): 1941-0174
ISSN (Paper): 1041-1135
DOI: 10.1109/LPT.2018.2863368
Regular:

MgxZn1-xO/ZnO quantum well (QW) photodetectors were fabricated by a radio-frequency magnetron sputtering system. The QW structure largely reduced the leakage current, from... View More

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