IEEE - Institute of Electrical and Electronics Engineers, Inc. - Modeling for Simulation and Control of a X-Y High Precision Positioning Table

3rd Annual IEEE Conference on Automation Science and Engineering

Author(s): J. Zimmermann ; O. Sawodny
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2007
Conference Location: Scottsdale, AZ, USA
Conference Date: 22 September 2007
Page(s): 1,093 - 1,098
ISBN (CD): 978-1-4244-1154-2
ISBN (Paper): 978-1-4244-1153-5
DOI: 10.1109/COASE.2007.4341750
Regular:

The production of micro-scale objects with nano-scale properties demands for appropriate measurement and test equipment for quality control. This work is motivated by an experimental setup to... View More

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