IEEE - Institute of Electrical and Electronics Engineers, Inc. - Development of a Dual-Phase Virtual Metrology Scheme

3rd Annual IEEE Conference on Automation Science and Engineering

Author(s): Fan-Tien Cheng ; Hsien-Cheng Huang ; Chi-An Kao
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2007
Conference Location: Scottsdale, AZ, USA
Conference Date: 22 September 2007
Page(s): 270 - 275
ISBN (CD): 978-1-4244-1154-2
ISBN (Paper): 978-1-4244-1153-5
DOI: 10.1109/COASE.2007.4341679
Regular:

This work proposes a dual-phase virtual metrology scheme. To consider both promptness and accuracy, this scheme generates dual-phase virtual metrology (VM) values. Phase I emphasizes promptness;... View More

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