IEEE - Institute of Electrical and Electronics Engineers, Inc. - Commercialization of MEMS and Nano Manufacturing

6th International Conference on Polymers and Adhesives in Microelectronics and Photonics. Polytronic 2007

Author(s): R. Maeda ; M. Takahashi ; S. Sasaki
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Odaiba, Tokyo, Japan
Conference Date: 16 January 2007
Page(s): 20 - 23
ISBN (CD): 978-1-4244-1186-3
ISBN (Paper): 978-1-4244-1130-6
DOI: 10.1109/POLYTR.2007.4339130
Regular:

MEMS (microelectromechanical systems) or nanotechnology is expected as one of the most promising R&D fields for the future business success, as MEMS or nanotechnology has a variety of... View More

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