IEEE - Institute of Electrical and Electronics Engineers, Inc. - Electrical Measurement of On-Mask Mismatch Resistor Structures

IEEE International Conference on Microelectronic Test Structures, ICMTS 2007

Author(s): S. Smith ; A. Tsiamis ; M. McCallum ; A.C. Hourd ; J.T.M. Stevenson ; A.J. Walton
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 2007
Conference Location: Tokyo, Japan
Conference Date: 19 March 2007
Page(s): 3 - 8
ISBN (CD): 1-4244-0781-8
ISBN (Paper): 1-4244-0780-X
DOI: 10.1109/ICMTS.2007.374445
Regular:

This paper describes the design and measurement of electrically measured test structures for the characterisation of dimensional mismatch in an advanced photomask making process. Test structures... View More

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