IEEE - Institute of Electrical and Electronics Engineers, Inc. - Wafer Level Processing of Silicon Arrays for Implantable Medical Devices

2007 Electronic Components and Technology Conference

Author(s): R. Bhandari ; S. Negi ; L. Rieth ; M. Topper ; R.A. Normann ; F. Solzbacher
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2007
Conference Location: Reno, NV, USA
Conference Date: 29 May 2007
Page(s): 1,567 - 1,572
ISBN (CD): 1-4244-0985-3
ISBN (Paper): 1-4244-0984-5
ISSN (Paper): 0569-5503
DOI: 10.1109/ECTC.2007.374004
Regular:

Micro system technology is well suited to batch fabricate multiple electrodes neural probes, intended for recording and stimulating neural tissue. Silicon neural probes have been produced using... View More

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