IEEE - Institute of Electrical and Electronics Engineers, Inc. - Pattern Density Methodology Using IBM Foundry Technologies

2007 Electronic Components and Technology Conference

Author(s): D. Scagnelli ; C. Grant ; K. Carrig ; T. Kemerer ; H. Landis ; T. McDevitt ; J.-t. Sucharitaves ; E. Tsai ; M. Kumar ; P. Pastel
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2007
Conference Location: Reno, NV, USA
Conference Date: 29 May 2007
Page(s): 1,300 - 1,307
ISBN (CD): 1-4244-0985-3
ISBN (Paper): 1-4244-0984-5
ISSN (Paper): 0569-5503
DOI: 10.1109/ECTC.2007.373963
Regular:

An overview of important pattern density requirements and tradeoffs for advanced RF, analog and digital technologies is presented. This paper reviews process sensitivities to pattern density, the... View More

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