IEEE - Institute of Electrical and Electronics Engineers, Inc. - IntelliSuite-« EMagAnalysis: an S-parameter Extraction Tool for Real Deformed Structures

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Fan Xu ; Shan-Liang Zhang ; Lei Zhou ; Bo Xu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
Page(s): 299 - 302
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.352031
Regular:

This paper discusses the method to extract s-parameters of real deformed MEMS devices with the combination of IntelliSuitereg EMagAnalysis and IntelliSuitereg TEMAnalysis, and the use of the data... View More

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