IEEE - Institute of Electrical and Electronics Engineers, Inc. - Two Dimensions Angular Sensor for Micro/Nano Measurement

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Qinggang Liu ; Yiping Li ; Wenyong Zhao ; Xiaotang Hu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
Page(s): 274 - 277
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.352025
Regular:

An optical non-contact and compact two dimensions angular sensor for micro angle measurement and nanometer scale measurement is introduced in the paper. The light beam emits from the angular... View More

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