IEEE - Institute of Electrical and Electronics Engineers, Inc. - Studies on MEMS Vacuum Sensor Based on Field Emission of Silicon Tips Array

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Weiren Wen ; Lingyun Wang ; Junchuan Gao ; Daoheng Sun
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
Page(s): 199 - 202
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.352261
Regular:

In this paper, we present our recent works on the fabrication and testing of a novel MEMS (micro electro mechanical systems) vacuum sensor based on field emission of silicon tips array. The... View More

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