IEEE - Institute of Electrical and Electronics Engineers, Inc. - NEMS Devices for Accelerometers Compatible with Thin SOI Technology

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): E. Oiller ; L. Duraffourg ; M.T. Delaye ; H. Grange ; S. Deneuville ; J. Bernos ; R. Dianoux ; F. Marchi ; D. Renaud ; T. Baron ; P. Andreucci ; P. Robert
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
Page(s): 180 - 185
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.352257
Regular:

The paper presents thin SOI NEMS structures for accelerometers based on thin SOI technology and compatible with "in-IC" integration. Modeling of Casimir force, design of accelerometers,... View More

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