IEEE - Institute of Electrical and Electronics Engineers, Inc. - Investigation of Intrinsic Stress Effects in Cantilever Structures

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Ch. Hollauer ; H. Ceric ; G. van Barel ; A. Witvrouw ; S. Selberherr
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
Page(s): 151 - 154
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.352250
Regular:

We present a method for the prediction of intrinsic stress in poly-SiGe thin films. The simulation of intrinsic stress effects in deposited thin film is an important issue, especially for the... View More

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