IEEE - Institute of Electrical and Electronics Engineers, Inc. - Virtual Operation of MEMS Devices Based on FEM Simulation

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Xin Zhao ; Lei Wang ; Kai Wang ; Guizhang Lu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
Page(s): 122 - 126
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.352244
Regular:

This paper presents the virtual operation of typical MEMS devices based on finite element method (FEM). The model implemented in the virtual environment which simulates the kinematics of MEMS... View More

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