IEEE - Institute of Electrical and Electronics Engineers, Inc. - SU-8 Buckled-type Microvalves Switched by Surface Tension Forces

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Lung-Jieh Yang ; Kuan-Chun Liu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
Page(s): 105 - 108
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.352238
Regular:

This paper presents the design, the fabrication, and the measurement result of a novel buckled-type microvalve. This device comprises of a parylene microtube for liquid transportation and a... View More

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