IEEE - Institute of Electrical and Electronics Engineers, Inc. - Solving the "Pull-in" Instability Problem of Electrostatic Microactuators using Nonlinear Control Techniques

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): K.O. Owusu ; F.L. Lewis
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
Page(s): 1,190 - 1,195
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.352232
Regular:

The operation of electrostatically actuated microelectromechanical systems (MEMS) devices is significantly limited by a saddle node bifurcation phenomenon to one-third of its full... View More

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