IEEE - Institute of Electrical and Electronics Engineers, Inc. - New Screen-printed Thermal Microactuator

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): P. Ginet ; C. Lucat ; M. Budinger ; F. Menil
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
Page(s): 87 - 91
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.352206
Regular:

A new process derived from the screen-printing technology and based on thick-film sacrificial layers has been developed for the fabrication of electrothermal microactuators. Studies of... View More

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