IEEE - Institute of Electrical and Electronics Engineers, Inc. - High Performance Piezoresistive Micro Strain Sensors

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Hung-I Kuo ; Jun Guo ; W.H. Ko
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
Page(s): 1,052 - 1,055
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.352199
Regular:

This paper presents results of studies on the high performance silicon piezoresistive bridge strain sensors. The microfabricated, boron diffused, piezoresistive strain sensors constructed in... View More

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