IEEE - Institute of Electrical and Electronics Engineers, Inc. - Anchor Loss Reduction in Resonant MEMS using MESA Structures

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): M. Pandey ; R.B. Reichenbach ; A.T. Zehnder ; A. Lal ; H.G. Craighead
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
Page(s): 880 - 885
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.352159
Regular:

The quality factor of an oscillator is inversely proportional to the damping and is a measure of the width of its amplitude vs. forcing frequency response. For sensing and signal processing... View More

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