IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Novel Piezo-driven Nanopositioning Mechanism for Precise Manipulating

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Li Ma ; Weibin Rong ; Lining Sun
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
Page(s): 842 - 846
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.352149
Regular:

A three-degree-of-freedom (3-DOF) novel nanopositioning mechanism was developed. The mechanism utilizes three piezoelectric actuators (PZTs) and ring plate hinges to realize... View More

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