IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and system-level simulation of a capacitive dual axis accelerometer

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Weiping Chen ; Jinling Ding ; Xiaowei Liu ; Chao Wang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
Page(s): 614 - 617
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.352093
Regular:

A system-level model of a bulk micromachined dual axis accelerometer is presented. The accelerometer has only one inertial mass, symmetrically suspended by four pairs of folded elastic beams. The... View More

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