IEEE - Institute of Electrical and Electronics Engineers, Inc. - CMOS MEMS Lorentz Force Dual-axis Scanning-Stage

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Chili-Ming Sun ; Chuan-Wei Wang ; Weileun Fang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
Page(s): 580 - 583
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.352086
Regular:

This study presents a novel dual-axis CMOS MEMS scanning stage driven using the Lorentz force. The device has been successfully implemented using the TSMC 2P4M process. The current routing... View More

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