IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Novel Fabrication for Pressure Sensor with Polymer Material and Its Characteristic Testing

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): H.S. Ko ; C.W. Liu ; C. Gau
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
Page(s): 561 - 566
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.352081
Regular:

In the current fabrication of pressure sensor, both the sensor cavity and the sensor diaphragm were made of SU-8 which can be readily spun coat on the substrate at desired thickness and patterned... View More

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