IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design of Readout Circuits Used for Micro-machined Capacitive Accelerometer

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Xiaowei Liu ; Haifeng Zhang ; Guangming Li ; Weiping Chen ; Xilian Wang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
Page(s): 537 - 541
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.352076
Regular:

This paper describes a closed-loop micro-machined accelerometer implemented in a bulk-micromachining technology with integrated CMOS circuit. The operational principle of accelerometer is... View More

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