IEEE - Institute of Electrical and Electronics Engineers, Inc. - Micro Fluidic System by Integrating Pressure Sensor Arrays with a Micro-Channel

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): H.S. Ko ; C.W. Liu ; C.G. Liu ; C. Gau
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
Page(s): 386 - 389
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.352042
Regular:

This fabrication process developed in the current paper is almost the reverse of the surface micromachining process usually used for the microchannel system. This allows the use of SU-8 to... View More

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