IEEE - Institute of Electrical and Electronics Engineers, Inc. - Special Invited Lecture: Improving the Performance of MEMS Actuators Using Feedback Control

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Frank.L. Lewis
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.351989
Regular:

As MEMS actuators are used for increasingly challenging applications, greater reliability, speed, and performance accuracy are needed. Increasing demands are reaching a point where mechanical... View More

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