IEEE - Institute of Electrical and Electronics Engineers, Inc. - Special Invited Lecture: Integrated MEMS Sensors

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Author(s): Shanhong Xia
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2007
Conference Location: Bangkok, Thailand
Conference Date: 16 January 2007
ISBN (Paper): 1-4244-0610-2
DOI: 10.1109/NEMS.2007.351988
Regular:

Monolithic ISFET (ion-sensitive field-effect transistor) pH sensor and microelectrode amperometric immunosensor based on the micro fabrication technology have been studied. The Monolithic ISFET... View More

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