IEEE - Institute of Electrical and Electronics Engineers, Inc. - An Integrated Micro-Fluxgate Magnetic Sensor with Sputtered Ferromagnetic Core

IEEE Instrumentation and Measurement Technology Conference

Author(s): A. Baschirotto ; E. Dallago ; P. Malcovati ; M. Marchesi ; E. Melissano ; P. Siciliano ; G. Venchi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2006
Conference Location: Sorrento, Italy
Conference Date: 24 April 2006
Page(s): 2,045 - 2,049
ISBN (CD): 0-7803-9360-0
ISBN (Paper): 0-7803-9359-7
ISSN (Paper): 1091-5281
DOI: 10.1109/IMTC.2006.328426
Regular:

In this paper a double axis planar micro-Fluxgate magnetic sensor is presented. The ferromagnetic core material, the Vitrovac 6025 X, has been deposited on top of the coils with the DC-magnetron... View More

Advertisement