IEEE - Institute of Electrical and Electronics Engineers, Inc. - Manufacturability of Multivariate Applications in the Semiconductor Industry

2006 IEEE International Conference on Automation Science and Engineering

Author(s): Chang Yung-Cheng ; Fan-Tien Cheng
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2006
Conference Location: Shanghai, China
Conference Date: 8 October 2006
Page(s): 230 - 235
ISBN (CD): 1-4244-0311-1
ISBN (Paper): 1-4244-0310-3
DOI: 10.1109/COASE.2006.326885
Regular:

When advanced automation technologies are applied in the semiconductor industry, advanced equipment control has become increasingly feasible; hence it is now easier to improve overall... View More

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