IEEE - Institute of Electrical and Electronics Engineers, Inc. - Performance Evaluation and Schedule Optimization of Multi-Cluster Tools with Process Times Uncertainty

2006 IEEE International Conference on Automation Science and Engineering

Author(s): Shengwei Ding ; Jingang Yi ; M.T. Zhang ; R. Akhavan-Tabatabaei
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2006
Conference Location: Shanghai, China
Conference Date: 8 October 2006
Page(s): 112 - 117
ISBN (CD): 1-4244-0311-1
ISBN (Paper): 1-4244-0310-3
DOI: 10.1109/COASE.2006.326864
Regular:

Performance evaluation and schedule optimization of cluster tools is challenging, especially when the process times are with uncertainty. In this paper, the critical path method (CPM) is used to... View More

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